| Title: |
BEOL Interconnects for 2nm Technology Node and Beyond |
| Authors: |
Thareja, Gaurav; Mema, Albi; Qu, Ge; Giuliani, Nicola; Cornigli, Davide; Tanaka, Takahisa; Piccinini, Enrico; Wang, Xingye; Palmieri, Andrea; Barkam, Swetha; Jamieson, Monika; Xie, Bo; You, Shi; Sharma, Shashank; Wu, Yongneng; Gage, Max; Wu, Zhiyuan; Shaviv, Roey; Nardi, Federico; Haverty, Michael; Spuller, Mathew; Ng, Ben; Tam, Norman; Jansen, Alexander; Lo, Andy; Chen, Zhebo; Mungai, Francis Kanyiri; Deshpande, Sameer; Ren, He; Tang, Jianshe; Naik, Mehul; Kesapragada, Sree; Lang, Chi-I; Muthukrishnan, Shankar; Brown, Brian; Tada, Munehiro; Lee, Joung Joo; Xia, Li Qun; Berkens, Maarten; Larcher, Luca; Kashefizadeh, Keyvan; Amrouch, Hussam; Tang, Xianmin |
| Source: |
2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2025 Symposium on. :1-3 Jun, 2025 |
| Relation: |
2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) |
| Database: |
IEEE Xplore Digital Library |