| Title: |
Monolithic CFET Flow Improvements Integrating Cover Spacer and Dual-WF RMG |
| Authors: |
Cavalcante, C.; Demuynck, S.; Sheng, C.; Batuk, D.; Hosseini, M.; Peng, A.; Stiers, K.; Vandooren, A.; Mertens, H.; Chiarella, T.; Arimura, H.; Mitard, J.; Georgieva, V.; Puliyalil, H.; Marquez, A. Sepulveda; Chistiakova, M.; Peter, A.; Kimura, Y.; Sebaai, F.; Gowda, P. Puttarame; Lai, J. G.; Arslanova, A.; Reddy, N.; Mingardi, A.; Sarkar, S. Kumar; Saroj, R. Kumar; Choudhury, S.; Alvarez, D.; Sarkar, T.; Koo, I. Gyo; Sanchez, E. Altamirano; Subramanian, S.; Lima, L. P. B.; Horiguchi, N.; Biesemans, S. |
| Source: |
2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2025 Symposium on. :1-3 Jun, 2025 |
| Relation: |
2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) |
| Database: |
IEEE Xplore Digital Library |