| Title: |
MP16/18 Integration in Ru Semi-Damascene using SiN-Based Core for Spacer-is-Dielectric SADP |
| Authors: |
Delie, Gilles; Decoster, Stefan; Wu, Chen; Renaud, Vincent; Marti, Giulio; Kundu, Souvik; Hermans, Yannick; Okudur, Fulya Ulu; Kenens, Bart; Heylen, Nancy; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt |
| Source: |
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025 |
| Relation: |
2025 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |