| Title: |
Addressing Integration Challenges in Direct Backside Contact of CFET |
| Authors: |
Sheng, C.; Demuynck, S.; Stiers, K.; Peng, A.; de Carvalho Cavalcante, C. Toledo; Chiarella, T.; Vandooren, A.; Hosseini, M.; Batuk, D.; Gowda, P. Puttarame; Sebaai, F.; Vandersmissen, K.; Chukka, R.; Di Donato, L.; Sun, W.; Hasan, M.; Weldeslassie, A.; Cerbu, D.; Jourdan, N.; Mingardi, A.; Saroj, R. Kumar; Kumar Sarkar, S.; Iacovo, S.; Montero, D.; Sarkar, T.; Shen, T-H.; Bogdanowicz, J.; Murdoch, G.; Mitard, J.; Reddy, N.; Koo, I. Gyo; Altamirano Sanchez, E.; Charley, A-L.; Lima, L. P. B.; Horiguchi, N.; Biesemans, S. |
| Source: |
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025 |
| Relation: |
2025 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |