| Title: |
Epitaxial Ruthenium for Advanced Interconnects |
| Authors: |
Adelmann, Christoph; Soulie, Jean-Philippe; Lee, Ho-Yun; Merckling, Clement; Vohra, Anurag; Van Troeye, Benoit; Chancerel, Francois; Brems, Steven; Swerts, Johan; Wu, Chen; Park, Seongho; Tokei, Zsolt |
| Source: |
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025 |
| Relation: |
2025 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |