| Title: |
UV surface pre-treatment and wet cleaning of Ruthenium MP18 semi-damascene structures |
| Authors: |
Okudur, Fulya Ulu; van Dorp, Dennis; Le, Quoc Toan; Tanaka, Tomoya; Nakano, Teppei; Delie, Gilles; Gort, Christopher; Kang, Hongrui; Groven, Benjamin; Conard, Thierry; Kundu, Souvik; Decoster, Stefan; Tilmann, Rita; Franquet, Alexis; Hofmann, Jan Philipp; Murdoch, Gayle; Shafahian, Ehsan; Reddy, Naveen; Sanchez, Efrain Altamirano; Wu, Chen; Park, Seongho; Tokei, Zsolt |
| Source: |
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025 |
| Relation: |
2025 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |