| Title: |
Selective and Superconformal Molybdenum Growth Strategies for Advanced Metallization |
| Authors: |
Mandia, David; Griffiths, Matthew; Brogan, Lee; Shafiefarhood, Arya; O'Loughlin, Jennifer; Kim, Justin; DeMarco, Nick; Alvandi, Youness; Blakeney, Kyle |
| Source: |
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025 |
| Relation: |
2025 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |