Phosphorus Incorporation and Ionization in Ultra-Thin Silicon Films
| Title: | Phosphorus Incorporation and Ionization in Ultra-Thin Silicon Films |
|---|---|
| Authors: | Pulici, Andrea; Seguini, Gabriele; Fanciulli, Marco; Perego, Michele |
| Source: | 2025 Silicon Nanoelectronics Workshop (SNW) Silicon Nanoelectronics Workshop (SNW), 2025. :90-91 Jun, 2025 |
| Relation: | 2025 Silicon Nanoelectronics Workshop (SNW) |
| Database: | IEEE Xplore Digital Library |