Coupling Study in a 2D Gimbal-less Quasi-static Piezoelectrically-Actuated MEMS Mirror
| Title: | Coupling Study in a 2D Gimbal-less Quasi-static Piezoelectrically-Actuated MEMS Mirror |
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| Authors: | Guerreiro, Sara R. P.; Piot, Adrien; Rocha, Rodrigo T.; Lagosh, Anton; Toshiyoshi, Hiroshi |
| Source: | 2025 IEEE Sensors Applications Symposium (SAS) Sensors Applications Symposium (SAS), 2025 IEEE. :1-6 Jul, 2025 |
| Relation: | 2025 IEEE Sensors Applications Symposium (SAS) |
| Database: | IEEE Xplore Digital Library |