| Title: |
Thermal Reliability Study of GAA FeFETs Under Simulated Back-End Process Conditions via Nitrogen-Based RTA |
| Authors: |
Lai, Yu-wen; Lin, Zhe-Yu; Huang, Yi-Cheng; Chen, Chun-Chi; You, Hsin-Chiang |
| Source: |
2025 32nd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2025 32nd International Workshop on. :113-116 Jul, 2025 |
| Relation: |
2025 32nd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) |
| Database: |
IEEE Xplore Digital Library |