| Title: |
Piezoelectric Micromirror with Integrated Resonant Sensor |
| Authors: |
Sasaki, Takashi; Piot, Adrien; Rocha, Rodrigo T.; Lagosh, Anton; Guerreiro, Sara R.P.; Fleury, Clement; Holzmann, Dominik; Travnik, Ales |
| Source: |
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2025 23rd International Conference on. :1429-1432 Jun, 2025 |
| Relation: |
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| Database: |
IEEE Xplore Digital Library |