Characterization of Plasma Produced at 2.45-GHz Frequency in CW Mode by Electron Cyclotron Resonance Method Using Langmuir Probe and Optical Emission Spectroscopy
| Title: | Characterization of Plasma Produced at 2.45-GHz Frequency in CW Mode by Electron Cyclotron Resonance Method Using Langmuir Probe and Optical Emission Spectroscopy |
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| Authors: | Pathak, M.; Naika, R.; Sharma, N.; Jain, S.K.; Ghodke, D.V.; Prasad, V.; Lad, M. |
| Source: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 53(10):2986-2996 Oct, 2025 |
| Database: | IEEE Xplore Digital Library |