Fusion-Bonded Linear CMUT Arrays Based on Low Resistivity Thermally Stable Titanium Silicide Electrodes
| Title: | Fusion-Bonded Linear CMUT Arrays Based on Low Resistivity Thermally Stable Titanium Silicide Electrodes |
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| Authors: | Nicolaisen, Peter Dalsgaard; Steenberg, Kitty; Grass, Rune Sixten; Thomsen, Erik Vilain |
| Source: | 2025 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2025 IEEE International. :1-4 Sep, 2025 |
| Relation: | 2025 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |