High sensitivity defect inspection of LiTaO3 and Piezoelectric-On-Insulator engineered substrates for SAW devices applications
| Title: | High sensitivity defect inspection of LiTaO3 and Piezoelectric-On-Insulator engineered substrates for SAW devices applications |
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| Authors: | Cela, Enrica; de Kernier, Isaure; Foucaud, Mathieu; Deniau, Nicolas; Sharma, Parikshit; Arias, Daniel |
| Source: | 2025 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2025 IEEE International. :1-3 Sep, 2025 |
| Relation: | 2025 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |