Good Practices Towards Nanofabrication Cleanroom Sustainability
| Title: | Good Practices Towards Nanofabrication Cleanroom Sustainability |
|---|---|
| Authors: | Kontomitrou, Vasiliki; Lymperopoulou, Smaragda; Stavrinidis, George; Stavrinidis, Antonios; Kostopoulos, Athanasios; Konstantinidis, George; Michalas, Loukas |
| Source: | 2025 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2025 International. :101-104 Oct, 2025 |
| Relation: | 2025 International Semiconductor Conference (CAS) |
| Database: | IEEE Xplore Digital Library |