| Title: |
Generic E-Beam Compensatory Carbon Deposition Method for High Aspect Ratio (HAR) TEM Sample Preparation |
| Authors: |
Liu, Chunxiao; Wu, Bingxing; Wei, Lei; Johnson, Tim; Gao, Smith |
| Source: |
2025 IEEE 32nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) the Physical and Failure Analysis of Integrated Circuits (IPFA), 2025 IEEE 32nd International Symposium on. :1-5 Aug, 2025 |
| Relation: |
2025 IEEE 32nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) |
| Database: |
IEEE Xplore Digital Library |