Analyzing the Impact of Inclined Airflow Within the EFEM on the Lateral Flow Around the FOUP Using Flow Visualization Techniques
| Title: | Analyzing the Impact of Inclined Airflow Within the EFEM on the Lateral Flow Around the FOUP Using Flow Visualization Techniques |
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| Authors: | Hu, S.; Lin, T.; Ali Zargar, O.; Lin, Y.; Shih, Y.; Leggett, G. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 39(1):53-61 Feb, 2026 |
| Database: | IEEE Xplore Digital Library |