Vertically Integrated Deep Ultraviolet Micro-Led Array With Photodetector for Stable and Compact Maskless Photolithography
| Title: | Vertically Integrated Deep Ultraviolet Micro-Led Array With Photodetector for Stable and Compact Maskless Photolithography |
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| Authors: | Kang, Yang; Yu, Huabin; Yao, Jikai; Memon, Muhammad Hunain; Liu, Xin; Chen, Wei; Sun, Haiding |
| Source: | 2025 IEEE Photonics Conference (IPC) Photonics Conference (IPC), 2025 IEEE. :1-2 Nov, 2025 |
| Relation: | 2025 IEEE Photonics Conference (IPC) |
| Database: | IEEE Xplore Digital Library |