| Title: |
Application of Precision Laser Micromachining Technologies for Manufacturing Components of Millimeter-Band Vacuum Microelectronic Devices |
| Authors: |
Nozhkin, Dmitry A.; Torgashov, Roman A.; Rostuntsova, Alena A.; Ozhogin, Ivan S.; Emelyanov, Valeriy V.; Churikova, Veronika D.; Molchanov, Sergey Yu; Bessonov, Dmitry A.; Ryskin, Nikita M. |
| Source: |
2025 IEEE XVII International Scientific and Technical Conference on Actual Problems of Electronic Instrument Engineering (APEIE) Actual Problems of Electronic Instrument Engineering (APEIE), 2025 IEEE XVII International Scientific and Technical Conference on. :1-5 Nov, 2025 |
| Relation: |
2025 IEEE XVII International Scientific and Technical Conference on Actual Problems of Electronic Instrument Engineering (APEIE) |
| Database: |
IEEE Xplore Digital Library |