Real-Time Metrology Capacity Optimization in Semiconductor Manufacturing
| Title: | Real-Time Metrology Capacity Optimization in Semiconductor Manufacturing |
|---|---|
| Authors: | Martin, Mathis; Dauzere-Peres, Stephane; Yugma, Claude; Mili, Aymen; Roussel, Renaud |
| Source: | 2025 Winter Simulation Conference (WSC) Winter Simulation Conference (WSC), 2025. :1664-1675 Dec, 2025 |
| Relation: | 2025 Winter Simulation Conference (WSC) |
| Database: | IEEE Xplore Digital Library |