Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration
| Title: | Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration |
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| Authors: | Yugma, Claude; Wartelle, Adrien; Dauzere-Peres, Stephane; Robert, Pascal; Roussel, Renaud; van Heugten, Jasper; Korabi, Taki-Eddine |
| Source: | 2025 Winter Simulation Conference (WSC) Winter Simulation Conference (WSC), 2025. :1-12 Dec, 2025 |
| Relation: | 2025 Winter Simulation Conference (WSC) |
| Database: | IEEE Xplore Digital Library |