Simulation in Semiconductor Manufacturing Between 2000 and 2050 Lessons Learned and Future Expectations
| Title: | Simulation in Semiconductor Manufacturing Between 2000 and 2050 Lessons Learned and Future Expectations |
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| Authors: | Fowler, John W.; Jang, Young Jae; Kalir, Adar; Lendermann, Peter; Monch, Lars; Rose, Oliver; Seidel, Georg; Yugma, Claude |
| Source: | 2025 Winter Simulation Conference (WSC) Winter Simulation Conference (WSC), 2025. :1649-1663 Dec, 2025 |
| Relation: | 2025 Winter Simulation Conference (WSC) |
| Database: | IEEE Xplore Digital Library |