Effects of Composition and Ozone Treatment on the Electrical Performance and Stability of ALD Indium Gallium Oxide TFTs
| Title: | Effects of Composition and Ozone Treatment on the Electrical Performance and Stability of ALD Indium Gallium Oxide TFTs |
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| Authors: | Yang, H.; Li, Y.; Lin, G.; Chen, Y.; Liang, Y.; Chen, C.; Chou, T.; Kei, C.; Huang, H.; Yang, F.; Lin, Y.; Lin, C. |
| Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 73(3):1387-1394 Mar, 2026 |
| Database: | IEEE Xplore Digital Library |