| Title: |
Demonstration of 16nm Pitch Two Metal Level Fully Self-Aligned Via Ru Interconnects |
| Authors: |
Delie, Gilles; Decoster, Stefan; Hermans, Yannick; Marti, Giulio; Renaud, Vincent; Vrancken, Evi; Kenens, Bart; Wachter, Bart De; Murdoch, Gayle; Wu, Chen; Park, Seongho; Tokei, Zsolt |
| Source: |
2025 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2025 IEEE International. :1-4 Dec, 2025 |
| Relation: |
2025 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |