| Title: |
Mechanics of Integration and Component Performance Step-up for Nanosheet Transistors with Ultrathin 2D Channel |
| Authors: |
Hung, Terry Y.T.; Chang, Shu-Jui; Chung, Yun-Yan; Chou, Ang-Sheng; Yun, Wei-Sheng; Wu, Wen-Chia; Li, Meng-Zhan; Ku, Shuer; Mao, Po-Sen; Chou, Sui-An; Chen, Edward; Su, Sheng-Kai; Heh, Dawei; Lin, Yu-Tung; Chou, Bo-Jhih; Chang, Yu-I; Yang, Chueh-Cheng; Wang, Shin-Yuan; Lin, Kris K.H; He, Liang-Ching; Ho, Yi-Fan; Lin, Kuan-Bo; Liu, Wei-Tung; Yang, Jen-Hao; Huang, Shu-Wei; Lin, Erh-Chen; Lin, Chun-Chun; Liu, Yen-Hui; Hsu, Chen-Feng; Lee, T.Y.; Vellianitis, Georgios; Van Dal, Mark; Liu, Bo-Heng; Kei, Chi-Chung; Yang, Ying-Mei; Chen, Tse-Ming; Lin, Minn-Tsong; Lin, Chun-Liang; Chang, Wen-Hao; Chien, Chao-Hsin; Hu, Chenming; Li, Ming-Yang; Cheng, Chao-Ching; Radu, Iuliana P.; Cao, Min |
| Source: |
2025 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2025 IEEE International. :1-4 Dec, 2025 |
| Relation: |
2025 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |