| Title: |
Wafer Delay and Cycle Time Minimization for Single-Arm Cluster Tools with Activity Time Variation Using NSGA-II and TOPSIS |
| Authors: |
Zeng, Shan; Liu, MengTing; Qiao, Yan; Zhang, SiWei; Cai, SiMian; Wu, NaiQi |
| Source: |
2025 International Conference on Networking, Sensing and Control (ICNSC) ICNSC Networking, Sensing and Control (ICNSC), 2025 International Conference on. :287-292 Oct, 2025 |
| Relation: |
2025 International Conference on Networking, Sensing and Control (ICNSC) |
| Database: |
IEEE Xplore Digital Library |