Film Thickness Prediction Based on Digital Twin and Neural Network
| Title: | Film Thickness Prediction Based on Digital Twin and Neural Network |
|---|---|
| Authors: | Lin, Zeqin; Quan, Haiye; Wu, Junjun; Chen, Weilin; Hu, Xiaoting; Li, Dachuang; Cheng, Yating |
| Source: | 2025 IEEE International Conference on Robotics and Biomimetics (ROBIO) Robotics and Biomimetics (ROBIO), 2025 IEEE International Conference on. :645-650 Dec, 2025 |
| Relation: | 2025 IEEE International Conference on Robotics and Biomimetics (ROBIO) |
| Database: | IEEE Xplore Digital Library |