Enhanced Performance of AlN/GaN HEMTs via Novel LPCVD-Based Sub-Gate Oxidation
| Title: | Enhanced Performance of AlN/GaN HEMTs via Novel LPCVD-Based Sub-Gate Oxidation |
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| Authors: | Liu, Zhiyong; Zhu, Jiejie; Qin, Lingjie; Zhang, Bowen; Li, Mengdi; Gao, Boxuan; Ma, Xiaohua |
| Source: | 2025 Asia-Pacific Microwave Conference (APMC) Microwave Conference (APMC), 2025 Asia-Pacific. :1-3 Dec, 2025 |
| Relation: | 2025 Asia-Pacific Microwave Conference (APMC) |
| Database: | IEEE Xplore Digital Library |