Optical Emission Spectroscopy and Neural Network Regression for Argon Flow Monitoring in PVD Processes
| Title: | Optical Emission Spectroscopy and Neural Network Regression for Argon Flow Monitoring in PVD Processes |
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| Authors: | Chen, Yu-Chieh; Lin, Yi-Cheng; Shih, Jin-Yu; Hsiao, Wen-Tse; Pan, Cheng-Tang |
| Source: | 2025 International Conference on Automation Technology (Automation) Automation Technology (Automation), 2025 International Conference on. :1-4 Nov, 2025 |
| Relation: | 2025 International Conference on Automation Technology (Automation) |
| Database: | IEEE Xplore Digital Library |