| Title: |
Quasi-in-Situ XPS Investigation of Surface Chemical State Evolution in Plasma Activation for SiO2 Hydrophilic Bonding |
| Authors: |
Yang, Haibo; Ding, Fei; Meng, Yihao; Zhang, Yu; Yang, Yudong; Kang, Qiushi; Zhang, Hongchao; Zhang, Lingyun; Jin, Renxi; Wang, Qidong |
| Source: |
2025 IEEE 27th Electronics Packaging Technology Conference (EPTC) Electronics Packaging Technology Conference (EPTC), 2025 IEEE 27th. :1-5 Dec, 2025 |
| Relation: |
2025 IEEE 27th Electronics Packaging Technology Conference (EPTC) |
| Database: |
IEEE Xplore Digital Library |