Investigating the Influence of Different Diverter Pipes on the Humidity for FOUP by Using Computational Fluid Dynamics
| Title: | Investigating the Influence of Different Diverter Pipes on the Humidity for FOUP by Using Computational Fluid Dynamics |
|---|---|
| Authors: | Chan, Y.; Du, J.; Lin, M.; Hsu, C. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 39(2):320-329 May, 2026 |
| Database: | IEEE Xplore Digital Library |