Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening
| Title: | Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening |
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| Authors: | Wen, C.; Lin, T.; Ali Zargar, O.; Hsieh, C.; Hu, S.; Shih, Y.; Leggett, G. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 39(2):310-319 May, 2026 |
| Database: | IEEE Xplore Digital Library |