Overcoming Size Effect With Low-Thermal-Budget Supercritical Fluid Oxygen Treatment for HZO-Based Ferroelectric Capacitors
| Title: | Overcoming Size Effect With Low-Thermal-Budget Supercritical Fluid Oxygen Treatment for HZO-Based Ferroelectric Capacitors |
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| Authors: | Hsu, J.; Chen, P.; Chen, M.; Hsu, S.S.H.; Chang, T.; Lien, C.; Chou, S.; Xie, B.; Kuo, T.; Lin, J.; Lee, Y.; Lin, C.; Huang, H. |
| Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 73(4):1802-1808 Apr, 2026 |
| Database: | IEEE Xplore Digital Library |