| Title: |
Direct analysis of RTA impact on S/D epi and channel resistance versus contact resistivity in n- and p-NSFET with cascaded transistor methodology |
| Authors: |
Eyben, Pierre; Rosseel, Erik; de Carvalho Cavalcante, Camila Toledo; Chiarella, Thomas; Dursap, Thomas; Sarkar, Ritam; Mertens, Hans; Casey, Daniel; Mitard, Jerome; Porret, Clement; Khazaka, Rami; Horiguchi, Naoto |
| Source: |
2025 IEEE 7th International Conference on Emerging Electronics (ICEE) Emerging Electronics (ICEE), 2025 IEEE 7th International Conference on. :1-4 Dec, 2025 |
| Relation: |
2025 IEEE 7th International Conference on Emerging Electronics (ICEE) |
| Database: |
IEEE Xplore Digital Library |