| Title: |
Ion Beam Etching as a Disruptive Integration Strategy for Advanced Logic: From T2T Scaling to Tilted 3D-IC Routing |
| Authors: |
Park, Jongsoon; Bai, Keun Hee; Ra, Hyonwook; Son, Seongho; Hong, Seongjun; Choi, Back Kyu; Kim, Sungtaek; Park, Yun Jae; Kim, Kyung Lim; Kim, Sunjung; Hong, Jong Woo; Kim, Sunghyun; Lee, Jong Myeong; Song, Jaihyuk; Park, Jongchul; Yeom, Geun Young |
| Source: |
2026 Pan Pacific Strategic Electronics Symposium (Pan Pacific) Pan Pacific Strategic Electronics Symposium (Pan Pacific), 2026. :81-86 Feb, 2026 |
| Relation: |
2026 Pan Pacific Strategic Electronics Symposium (Pan Pacific) |
| Database: |
IEEE Xplore Digital Library |