Piezoelectric Microspeaker on Corrugated Parylene Diaphragm
| Title: | Piezoelectric Microspeaker on Corrugated Parylene Diaphragm |
|---|---|
| Authors: | Zhang, Yicheng; Sengupta, Anik; Esfahani, Kianoush Sadeghian; Roy, Akash; Kim, Eun S. |
| Source: | 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2026 IEEE 39th International Conference on. :1-4 Jan, 2026 |
| Relation: | 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: | IEEE Xplore Digital Library |