| Title: |
A Parallel-Beam MEMS Six-Axis Force/Torque Sensor with High Sensitivity, Low Crosstalk, and Packaging for Large-Range Applications |
| Authors: |
Zhu, Xincheng; Wang, Xueliang; Zhong, Yang; Miao, Jiahao; Lin, Cong; Zhou, Zhanxuan; Yu, Xiaomei |
| Source: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2026 IEEE 39th International Conference on. :1026-1029 Jan, 2026 |
| Relation: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |