| Title: |
Monolithically Integrated High-Resolution and Large-Range MEMS Triaxial Force Sensor with Sub-Millimeter Proximity Sensing |
| Authors: |
Zhu, Xincheng; Lin, Cong; Wang, Xueliang; Zhong, Yang; Miao, Jiahao; Zhou, Zhanxuan; Yu, Xiaomei |
| Source: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2026 IEEE 39th International Conference on. :1022-1025 Jan, 2026 |
| Relation: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |