| Title: |
Piezoelectric Micromirror Using Integrated Resonant Sensors with Temperature Compensation Function |
| Authors: |
Sasaki, Takashi; Piot, Adrien; Guerreiro, Sara R.P.; Lagosh, Anton; Rocha, Rodrigo T.; Fleury, Clement; Holzmann, Dominik; Travnik, Ales |
| Source: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2026 IEEE 39th International Conference on. :1332-1335 Jan, 2026 |
| Relation: |
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |