Grid-Structured Cantilever Beam Fabrication Technique Based on Cavity-SOI Process for MEMS Micromirror
| Title: | Grid-Structured Cantilever Beam Fabrication Technique Based on Cavity-SOI Process for MEMS Micromirror |
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| Authors: | Qiao, W.; Xue, W.; Liu, Y.; Huang, J.; Ding, P.; Sun, Q.; Wang, L.; Su, Y.; Peng, Y.; Wu, Z. |
| Source: | IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 26(8):11862-11870 Apr, 2026 |
| Database: | IEEE Xplore Digital Library |