Ultra-Compact MEMS Pirani Gauge for In Situ Wafer-Level Vacuum Monitoring
| Title: | Ultra-Compact MEMS Pirani Gauge for In Situ Wafer-Level Vacuum Monitoring |
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| Authors: | Ding, P.; Su, Y.; Liu, Y.; Chen, S.; Wang, S.; Wang, Y.; Li, M.; Qiao, Q.; Wu, Z. |
| Source: | IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 26(9):12972-12981 May, 2026 |
| Database: | IEEE Xplore Digital Library |