Optical Fiber Fabry–Perot Pressure Sensors Based on MEMS-Fabricated Corrugated Diaphragms
| Title: | Optical Fiber Fabry–Perot Pressure Sensors Based on MEMS-Fabricated Corrugated Diaphragms |
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| Authors: | Xiang, X.; Lin, H.; Liu, H.; Li, X.; Sun, T.; Xu, H.; Dai, P.; Dai, X.; Liu, C.; Xiang, M.; Jiang, J.; Liu, T.; Wang, S. |
| Source: | Journal of Lightwave Technology J. Lightwave Technol. Lightwave Technology, Journal of. 44(13):5790-5798 Jul, 2026 |
| Database: | IEEE Xplore Digital Library |