Enhanced Performance of GaN MIS-FETs with LPCVD-SiNx/PEALD-AlN Stack Using N2 RPP Treatment
| Title: | Enhanced Performance of GaN MIS-FETs with LPCVD-SiNx/PEALD-AlN Stack Using N2 RPP Treatment |
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| Authors: | Li, Yu; Yu, Guohao; Li, Ang; Ding, Liying; Cai, Yong; Zeng, Zhongming; Zhang, Baoshun |
| Source: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2026 10th IEEE. :1-3 Mar, 2026 |
| Relation: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Database: | IEEE Xplore Digital Library |