| Title: |
Comparative Study of Vacuum-Deposited and Solution-Combustion-Synthesis Al2O3-HfO2 Gate Dielectric for a-IGZO Thin-Film Transistors |
| Authors: |
Kastian, Dian Budiarti; Bermundo, Juan Paolo; Quino, Candell Grace Paredes; Hara, Kosuke O.; Uraoka, Yukiharu |
| Source: |
2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2026 10th IEEE. :1-3 Mar, 2026 |
| Relation: |
2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Database: |
IEEE Xplore Digital Library |