| Title: |
Highly Stable BEOL-Compatible 78 nm IGZO TFT (11.3 mV ∆Vth at 10 ks/125 °C) with ITO S/D Contact and F Doping |
| Authors: |
Lv, Shaocong; Li, Xianglong; Zhao, Ziteng; Cui, Wenbo; Zhang, Zebin; Guo, Peng; Han, Hecheng; Wang, Yiming; Yan, Zhuocheng; Xin, Qian; Li, Yuxiang; Zhang, Jiawei |
| Source: |
2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2026 10th IEEE. :1-3 Mar, 2026 |
| Relation: |
2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Database: |
IEEE Xplore Digital Library |