| Title: |
Mechanical Stress Impact on Nanosheet Device Performance |
| Authors: |
Hiratsuka, Tatsumasa; Gonzalez, Mario; Pondini, Andrea; Eneman, Geert; Matagne, Philippe; Chiarella, Thomas; Mertens, Hans; Mitard, Jerome; Horiguchi, Naoto; Kobayashi, Shoji; Hagimoto, Yoshiya; Nakazawa, Masashi |
| Source: |
2026 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2026 IEEE International. :1-5 Mar, 2026 |
| Relation: |
2026 IEEE International Reliability Physics Symposium (IRPS) |
| Database: |
IEEE Xplore Digital Library |