| Title: |
The Electrical and Reliability Characteristics of Gate Dielectric SiON for Sub 40nm Applications |
| Authors: |
Sim, Hyunjun; Choi, H.; Rajachidambaram, M.S.; Shi, J.; Yatzor, B.; Dey, R.; Caprotti, N.; Gonzalez, O. Huerta; Pothireddi, M.M.; Shen, H.; Chung, P.; Zhao, R.; Korevaar, B.A. |
| Source: |
2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2026 37th Annual. :1-4 May, 2026 |
| Relation: |
2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |