Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells
| Title: | Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells |
|---|---|
| Authors: | Marx, Tobias; Pfingstl, Simon; Horsting, Marian; Weig, Eva M.; Wenzel, Matthias |
| Source: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2026 IEEE International Symposium on. :1-4 May, 2026 |
| Relation: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) |
| Database: | IEEE Xplore Digital Library |