| Title: |
Layer Transfer of Epitaxial Ru by Metal-Metal Bonding: Towards Single-Crystal Interconnects |
| Authors: |
Adelmann, Christoph; Chancerel, Francois; Soulie, Jean-Philippe; Brems, Steven; Kerepesi, Peter; Dornetshumer, Michael; Medl, Florian; Wernicke, Tobias; Flotgen, Christoph; Wimplinger, Markus; Tokei, Zsolt; Park, Seongho |
| Source: |
2026 IEEE 76th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2026 IEEE 76th. :1425-1431 May, 2026 |
| Relation: |
2026 IEEE 76th Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |