| Title: |
Fabrication and transfer of fine pitch RDL using Si temporary carrier combined with IR laser release approach |
| Authors: |
Chancerel, Francois; Casillas, Gilberto; Slabbekoorn, John; Urban, Peter; Halas, Simon; Graml, Mario; Brems, Steven; Kennes, Koen; Podpod, Arnita; Uhrmann, Thomas; Wimplinger, Markus; Phommahaxay, Alain; Tokei, Zsolt; Beyne, Eric |
| Source: |
2026 IEEE 76th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2026 IEEE 76th. :873-877 May, 2026 |
| Relation: |
2026 IEEE 76th Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |